Probe device, probe card channel information creation program, and probe card information creation device

摘要

A probe device includes a supporting member for supporting the probe card having a plurality of channels. Each of the channels has a group of probes which are brought into contact with plural electrode pads of one of objects to be inspected. The probe device further includes a channel information creation unit for creating channel information containing a layout of a group of the plurality of channels and an identification number of each of the channels and transmitting the created channel information to a controller, a channel information memory unit for storing the channel information received from the channel information creation unit, and an object layout memory unit for storing layout information of the objects. The controller performs an inspection of the objects based on the channel information stored in the channel information memory unit and the layout information of the objects stored in the object layout memory unit.