| 摘要 |
A flow control valve wherein flow control is effected by determining the stop position of a piston in an open state by abutment, such flow control being effected by remote control and accurately. In a closed state, the urging forces of return springs (20, 21) act on a piston (22), so that a diaphragm (24) is in close contact with a valve seat (54). Under these circumstances, feeding compressed air into a pilot chamber (55) causes the piston (22) to move, so that the diaphragm (24) is spaced from the valve seat (54). Thereafter, the piston (22) abuts against a nut (19), thereby stopping the diaphragm (24), and the clearance between the diaphragm (24) and the valve seat (54) is fixed and the open state is restored. However, since the nut (19) can be moved to an optional position as by a servomotor (11), the position where the piston (22) abuts against the nut (19) can be changed.
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