发明名称 |
Method for the manufacture and transmissive irradiation of a sample, and particle-optical system |
摘要 |
The invention provides a method for the manufacture and transmissive irradiation of a sample, comprising the steps of: A Providing a particle-optical system having an internal low-pressure chamber and suitable for the generation of an electron beam and an intersecting ion beam in said chamber; B Providing a specimen within the chamber, carried by a manipulator; C Irradiating the specimen with the ion beam so as to cut a sample from the specimen; D Relatively displacing the sample thus cut to a sample holder than can be manipulated; E Attaching the sample to the sample holder; F Using an electron beam to perform transmissive irradiation of the sample thus attached to the sample holder, characterized in that step F is performed in the low-pressure chamber of the particle-optical system according to step A.
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申请公布号 |
US6963068(B2) |
申请公布日期 |
2005.11.08 |
申请号 |
US20040758651 |
申请日期 |
2004.01.15 |
申请人 |
FEI COMPANY |
发明人 |
ASSELBERGS PETER EMILE STEPHAN JOSEPH;TAPPEL HENDRIK GEZINUS;VAN VEEN GERARD NICOLAAS ANNE |
分类号 |
G01N1/32;G01N1/04;G01N1/28;G21K5/00;G21K5/04;H01J37/20;H01J37/26;H01J37/317;(IPC1-7):H01J37/30 |
主分类号 |
G01N1/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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