发明名称 |
Micropattern measuring method, micropattern measuring apparatus, and computer-readable recording medium on which a micropattern measuring program is recorded |
摘要 |
A micropattern measuring method discloses herein includes acquiring an image of a micropattern including plural layers; extracting a rough outline of the micropattern in the image as a sequence of points including plural points; dividing the plural points composing the sequence of points into groups; making each of the groups as each of patterns belong to any of the plural layers; and acquiring edge coordinates of a pattern to be measured from the patterns which are made to belong to the respective layers.
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申请公布号 |
US6963819(B2) |
申请公布日期 |
2005.11.08 |
申请号 |
US20030685392 |
申请日期 |
2003.10.16 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
IKEDA TAKAHIRO;MIYANO YUMIKO |
分类号 |
G01B15/00;G06F15/00;G06K9/00;G06T7/00;G06T7/40;G06T7/60;H01L21/66;(IPC1-7):G06F15/00 |
主分类号 |
G01B15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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