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发明名称
Method for forming composite vapor-deposited films with varied compositions formed in the initial and final stages of deposition, composite vapor-deposition material for the film and method for manufacture thereof
摘要
申请公布号
KR100526645(B1)
申请公布日期
2005.11.08
申请号
KR20000015086
申请日期
2000.03.24
申请人
发明人
分类号
C23C14/24;(IPC1-7):C23C14/24
主分类号
C23C14/24
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