| 摘要 |
PROBLEM TO BE SOLVED: To provide a diaphragm pump to enable an improvement in the discharge performance of a bubble from a pump chamber, and to easily perform. SOLUTION: The diaphragm pump 1 is provided with the pump chamber 13, in which an inlet port 16 opened and closed by an inlet valve 3 and a discharge port 17 opened and closed by a discharge valve 4 communicate. A first piezoelectric element (vibrator) 5 installed in a first diaphragm 14 making one side wall placed in the pressurized/depressurized direction of the pump chamber 13 is drived to send out the liquid in the pump chamber 13. A second diaphragm 15 is installed in the other side wall 12a placed in the pressurized/depressurized direction of the pump chamber 13. Placed outside the pump chamber 13, a second piezoelectric element (vibrator) 6 is installed in the second diaphragm 15. COPYRIGHT: (C)2006,JPO&NCIPI
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