INSPECTION METHOD AND DEVICE USING ELECTRONIC BEAM

摘要

PROBLEM TO BE SOLVED: To provide an inspection method and device using an electronic beam capable of preventing the incorrect detection of a defect in a sample even if the methods of acquiring a reference image and an inspection image are different from each other.

SOLUTION: The inspection method comprises the first step of creating a reference image for use as a reference for the inspection of a sample by irradiating an electronic beam on the sample, the second step of acquiring an inspection image to be the object of the inspection using a method different from the first step of creating the reference image by irradiating the electronic beam on the sample, the third step of adjusting the image parameter of the inspection image according to the parameter of the reference image, and the fourth step of extracting a defect in the case where the defects are found after the comparison of the inspection image adjusted in the third step with the reference image.

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