ULTRAVIOLET RAY-ASSISTED ULTRA SHORT PULSED LASER BEAM MACHINING APPARATUS AND METHOD

摘要

PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus and method that make unique precision microfabrication possible at high speed by efficiently applying a ultra short pulsed laser beam to a workpiece.

SOLUTION: The laser beam machining apparatus works by possessing a machining head which is equipped with an optical system for guiding and converging the ultra short pulsed laser beam from a femtosecond laser oscillator 15 onto a machining point 30 of the workpiece 31 and also possessing a ultraviolet light source 22 which is for emitting the light near the machining point. The laser beam machining method includes an energy absorbing process in which two processes occur synchronously, namely, a ultraviolet electron exciting/absorbing process which excites to a higher level the valence band electron of an object to be irradiated with the ultraviolet ray and an absorbing process for a multi-photon which emits the ultra short pulsed laser beam to the object. Accordingly, the high precision and high-speed microfabrication by laser is implemented.

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