| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a device or the like for detecting deterioration in a driving mechanism which can realize part exchange, with timings which avoid reduction in the operating efficiency of an exposure device and can minimize reduction in the throughput, by detecting the mechanical deteriorated state of the driving mechanism. <P>SOLUTION: An encoder 22 detects the amount of rotation of a motor 15, driving a needle and the direction of the rotation thereof. A current detector 23 detects the current flowing through the motor 15. A deciding unit 25, using the detected results of the encoder 22 and the current detector 23, decides mechanical deterioration in the driving mechanism, including the needle and the motor 15, on the basis of at least one of a positional change of the needle with respect to a target position and the current flowing through the motor 15, and identifies a deteriorated portion. An alarm device 26 issues an alarm, according to the decided result of the decider 25. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
