| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a damping adapter 3 which is capable of inserting into a suction duct between a service chamber 2 and a vacuum pump 1. <P>SOLUTION: The adapter 3 comprises a tubular duct wall 6 in the shape of a flexible bellows surrounded by a damping sleeve 7 which is supported by two end flanges 4, 5. Plait-like parts 6a, 6b of the flexible bellows are subjected to a passive damping elastomer 8a which is engaged between continuous plait-like parts 6a, 6b on its external surface. Thereby, transmission of vibration from the vacuum pump 1 to the service chamber 2 correspondingly reduces, especially, the adapter makes it possible to apply in the field of a microscope. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
