发明名称 |
RADIATION DETECTOR |
摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray detector which can prevent deterioration in the light emission efficiency and the resolution due to the deliquescence of a scintillator layer. SOLUTION: A protective layer 44 for covering the scintillator layer 43 of the X-ray detector 1 has the constitution in which a second protective film 44b of a silica film is stacked on a first protective film 44a of a transparent resin film. The water permeability of the protective layer 44 becomes <1.2 g/m<SP>2</SP>day. The second protective film 44a divides the pinhole defect of the first protective film 44a. The high heat-resistance of the second protective film 44b can divide the defect after a heating process. The first protective film 44a protects the second protective film 44b. The second protective film 44b can prevent the generation of a crack. COPYRIGHT: (C)2006,JPO&NCIPI
|
申请公布号 |
JP2005308583(A) |
申请公布日期 |
2005.11.04 |
申请号 |
JP20040126954 |
申请日期 |
2004.04.22 |
申请人 |
TOSHIBA CORP;TOSHIBA ELECTRON TUBES & DEVICES CO LTD |
发明人 |
FUJISAWA AKIKO;YOSHIDA ATSUYA;FUJIEDA SHINETSU |
分类号 |
G01T1/20;H01L27/14;H01L27/146;H04N5/32;(IPC1-7):G01T1/20 |
主分类号 |
G01T1/20 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|