| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an active vibration-isolating device capable of enhancing the vibration-isolating performance by using a gas damper. <P>SOLUTION: In the vibration-isolating device to support a structure 16 on an installation face 15 via an air damper 45, the position of the structure 16 is measured by using a position sensor 29, and the pressure in the air damper 45 is measured by using a pressure sensor 28. The position (height) of the air damper 45 in the supporting direction of the structure 16 is obtained from the measured value of the position sensor 29, and the target pressure in the air damper 45 is calculated by using the height and the rigidity required for the air damper 45. The flow rate of air in a servo valve 56 is controlled so that the pressure in the air damper 45 reaches the target value. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
