METHOD FOR MANUFACTURING DISPLAY PANEL, METHOD FOR MANUFACTURING DISPLAY DEVICE AND EXPOSURE APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method by which exposure misalignment in an exposure step in the manufacturing process of a plasma display or the like can be suitably detected.

SOLUTION: The method includes a first judging step to calculate the misalignment quantity based on the distance between positioning marks of a substrate and of an exposure mask and to judge whether the calculated misalignment quantity is within the allowance or not. The method also includes a second judging step to calculate a range from the minimum to the maximum of the relative difference between the calculated misalignment quantity and the reference and to judge whether the calculated range is within the allowance or not.

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