| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing fixed blades of a turbo molecular pump used for evacuation. <P>SOLUTION: A blade member of a metal plate is etched to form turbine blades T2 supported on a circular inner peripheral end 231. When etching the turbine blades T2, etching is performed on a predetermined width area of a dimension L2 from the pump suction port side blade end of the suction port facing surface S1 of the turbine blade T2 and on a predetermined width area of the dimension L2 from the pump discharge port side blade end of a discharge port facing surface S2. Blade thicknesses t3 of the respective predetermined width areas thereby become smaller than blade thicknesses t of other areas. The turbine blades T2 are then bent with respect to the inner peripheral end 231 to form a blade angle θ2. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
