| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a condenser for EUV light or the like, having a high condensing rate and a long life time for use in a high output EUV light source apparatus. <P>SOLUTION: The condenser for EUV light includes a first mirror 2 disposed on the outermost side; and a second mirror 3 composed of a spheroid disposed, with its rotation central axis overlapped on the same axis as that of the first mirror 2, such that their focal points substantially coincide with each other. A mirror fixing member 4 called a spider is disposed on an EUV-light exit side end part 3a of the second mirror 3, a cooling structure 23 is formed on an EUV light exit end 2a side of the first mirror 2, and an inflow pipe 7a and a discharge pipe 7b are provided. A cooling structure 22 is formed close to the incident side of the central rear surface of the second mirror, and an inflow pipe 6a and a discharge pipe 6b are provided. An optical path, from an EUV-light radiation source S1 to a focal point S2 by discharge plasma, is indicated by virtual lines P1, P2, P3, and P4. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
