MULTI-STAGE VACUUM PUMP AND PUMP FACILITY EQUIPPED WITH THAT KIND OF PUMP

摘要

PROBLEM TO BE SOLVED: To provide a multi-stage vacuum pump equipped with at least one low pressure first stage and at least one high pressure second stage. SOLUTION: At least one stage includes at least one inlet for making pumped gas flow in and at least one stage includes at least one outlet opening to outside for making pumped gas discharged. The first stage and the second stage are communicated to make gas flow between the fist stage and the second stage. The first stage operates by less flow rate than flow rate of the second stage. Oil is injected in the stage having larger flow rate in an oil seal rotary vane displacement pump. COPYRIGHT: (C)2006,JPO&NCIPI