| 摘要 |
PROBLEM TO BE SOLVED: To provide a vertical-type boat that can control the deformation of the wafer holder at heat treatment and warpage of a semiconductor wafer and the like, involved in using a larger diameter for a semiconductor wafer, and can well control occurrence of slip dislocation, even if the semiconductor wafer has a large diameter. SOLUTION: In a vertical-type boat 1, composed of a plurality of wafer holders 2 that hold semiconductor wafers W, a plurality of support struts 4 that flatly support respective wafer holders in multiple stages, and joining members 5a and 5b at both ends that fix each support strut in an erected state in parallel, the wafer holders are set up stepwise in three stages composed of a shape-retaining part 6, a wafer-holding part 7 and a guard part 8 which are of an annular plate or of an annular plate having edges, and whose cross-section is elevated stepwise from the center toward the periphery. COPYRIGHT: (C)2006,JPO&NCIPI |
