| 摘要 |
PROBLEM TO BE SOLVED: To provide a suction chuck for wafers for safely chucking and storing a wafer. SOLUTION: This suction chuck for wafer is provided with the body 10, having a circular suction face 11 and a suction pad 21 attached to the suction face 11, and the suction face 11 is formed with radially recessed grooves 15, 15, ... which are communicated via a central connection hole 12 to an evacuation source, and the suction pad 21 is formed with concentric openings 21a, 21a, ... which are divided at the same positions in the circumferential direction. COPYRIGHT: (C)2006,JPO&NCIPI |
