| 摘要 |
PROBLEM TO BE SOLVED: To provide a flat linear stage which is simple in structure and surely returns a movable stage to a home position. SOLUTION: A first position detecting long scale linear member 11 crossing an X-axis at a right angle and a second position detecting long scale linear member 12 crossing a Y-axis at a right angle are arranged on a base plate 3, and a first optical sensor 21 and a second optical sensor 22 are provided on the side of a movable stage 4. The movable stage 4 is moved along the X-axis and is positioned based on the first position detecting long scale linear member 11, as a reference, to zero-return an X-axis present position storage register Rx. On the other hand, the movable stage 4 is moved along the Y-axis and is positioned based on the second position detecting long scale linear member 12, as a reference, to zero-return a Y-axis present position storage register Ry. Further, the above operations are repeated, and consequently precision in returning the movable stage 4 to the home position is ensured. COPYRIGHT: (C)2006,JPO&NCIPI
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