JOINING METHOD OF STRUCTURE USING ENERGY BEAM

摘要

PROBLEM TO BE SOLVED: To provide a method and apparatus for joining a structure at a temperature causing no denaturation nor deterioration in a substrate or a device. SOLUTION: The joining method is a method for joining two structures to each other and is characterized by a process in which the joining face of at least one structure is irradiated with an energy beam and a process in which the joining face of the one structure so irradiated is brought into contact with the joining face of the other structure. Also, a joining apparatus is used which is characterized by a lens barrel having an energy beam generating source and by an irradiation part for emitting the energy beam. COPYRIGHT: (C)2006,JPO&NCIPI