| 摘要 |
PROBLEM TO BE SOLVED: To shorten the transfer time, increase the number of pieces treated and improve the throughput, in such a way that a plurality of workpieces can be transferred by each holder, having a ring-shaped support plate. SOLUTION: The apparatus comprises a lid 6 for shutting a furnace opening 4 of a heat treating furnace 3 tightly; a holder 9 for holding the plurality of workpieces w, arranged on the lid 6 via a ring-shaped support plate 15 at a designated interval; a lifting mechanism 11 which carries the holder 9 in/out, into/from the heat treating furnace 3; and a transfer mechanism 21, having a plurality of substrate support fixture 20 at a designated interval which transfers the workpieces w between a storing container 16 storing the plurality of workpieces w at a designated interval and the holder 9. Furthermore, the apparatus prepares a mechanism 28 for gripping from the above that gripps the workpiece w under each substrate supporting fixture 20 of the transferring mechanism 21, and the mechanism 28 for gripping from the above has a fixed latch 30, which is arranged at an end portion of the substrate support fixture 20, latching the front-end portion of the workpiece w, and a movable latch 31, which is arranged at a rear end side of the substrate supporting fixture 20, latching the rear-end portion of the workpiece w, in a manner that it can be installed and removed. COPYRIGHT: (C)2006,JPO&NCIPI |
