| 摘要 |
PROBLEM TO BE SOLVED: To provide the formation method of aluminum wiring which realizes formation of aluminum wirings, by filling in opening parts of different sizes, including a fine groove and hole at a normal pressure, and enables the fine groove and hole for wiring to be charged with aluminum by plating. SOLUTION: In the formation method of aluminum wiring, an insulating layer with an opening is provided to a wiring substrate surface; a seed metal layer is deposited at the bottom and a sidewall surface inside the opening and in the surface of the insulating layer; the opening is charged with aluminum or aluminum alloy through plating; and a metal layer, containing aluminum or aluminum alloy other than the inside of the opening, is removed. COPYRIGHT: (C)2006,JPO&NCIPI
|
