| 摘要 |
PROBLEM TO BE SOLVED: To provide an ion generator capable of generating ion stably without being influenced by humidity in the air. SOLUTION: The ion generator is provided with an electron source 10 emitting electron by field emission, an anode electrode 9 arranged in opposition to a surface electrode of the electron source 10 and with accelerating voltage impressed between itself and the surface electrode with the latter as a low potential side, and a rectangular parallelepiped case 20 housing the electron source 10 and the anode electrode 9. The case 20 is provided with a gas lead-in port 21 leading in dried gas to be supplied to an ion-generating space B between the anode electrode 9 and the electron source 10, and a blow-out port 22 from which ion is blown out generated by the electron beams emitted from the electron source 10 acting on the dried gas in the ion generating space B. COPYRIGHT: (C)2006,JPO&NCIPI
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