METHOD AND DEVICE FOR PRODUCING ORGANIC EL ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a method for producing vapor-deposited films of good quality for organic El elements uniformly and rapidly in high productivity by electromagnetic induction heating of a container to which the raw material is introduced and a device used for the same. SOLUTION: The device for vapor deposition of films for the organic EL elements vaporizes an organic material 5 for the organic EL elements in the container 2 and deposits the material in thin film on the surface of a film-forming substrate 6 and comprises the container 2 constructed of a material capable of generating heat by electromagnetic induction and a means for heating the container for vaporizing the organic material 5 by electromagnetic induction. Also provided is a method for producing the organic EL elements by using the device. COPYRIGHT: (C)2006,JPO&NCIPI