SCANNING ELECTRON MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To prevent the visual field deviation of a characteristic object at a stage without being sufficiently corrected in obtaining a coordinate value in a scanning electron microscope used in converting a coordinate value of a characteristic object on a sample sent from the other device to the coordinate value in the scanning electron microscope, in the scanning electron microscope having a function for observing the characteristic object on the sample. SOLUTION: A characteristic object in the vicinity of the center of a sample is first selected, and characteristic objects are spirally selected from the sample center toward its periphery. COPYRIGHT: (C)2006,JPO&NCIPI