MANUFACTURING METHOD OF THIN FILM TRANSISTOR

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a thin film transistor in self-alignment by using a liquid drop discharging method regardless of the accuracy of the discharge position of a liquid drop discharging device. SOLUTION: An organic resin film 107 or the like are applied, and the organic resin film 107 is processed into a desired shape by using such a method as etch back, exposure, and development. A semiconductor layer 104 containing impurities of one conductive type is etched with the organic resin film having the desired shape as a mask. The organic resin film having the desired shape is used to form regions with different wettability. COPYRIGHT: (C)2006,JPO&NCIPI