ALIGNER, DEVICE MANUFACTURING METHOD, PATTERN GENERATION DEVICE, AND MAINTENANCE METHOD

摘要

PROBLEM TO BE SOLVED: To provide an aligner and a maintenance method for preventing defect of a pattern and lowering of throughput by realizing an improvement of maintenance properties and easiness of exchange of a pattern generation device.

SOLUTION: The aligner, which exposes a desired pattern to a treatment object via a projection optical system, has a pattern generation means which has a plurality of picture elements and generates the desired pattern by driving of the plurality of picture elements; a measurement means for measuring at least one of optical characteristic of the pattern generation means and the driving state of the plurality of picture elements; and a maintenance means for carrying out maintenance of the pattern generation means on the basis of the measurements of the measuring means.

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