| 摘要 |
<P>PROBLEM TO BE SOLVED: To retain cooling liquid at a prescribed conductivity even in a closed space where the cooling liquid stays. <P>SOLUTION: Ion exchange resin 16 is housed at a bottom side of a container 10 where cooling liquid 14 is stored, and when impurities generated in the cooling liquid 14 move to the bottom side by gravity according to the gravity difference with the cooling liquid 14, the impurities moved are removed by the ion exchange resin 16, and by moving the cooling water 14 removed of the impurities toward the upper side, the conductivity of the cooling liquid 14 in the container 10 is maintained at a low conductivity. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
