| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat-shielding member for a silicon single crystal pulling-up apparatus which can comparatively easily change the required shielding amount of heat radiation with a small number of heat shielding members with respect to the pulling-up of silicon single crystal rods having a variety of material qualities. SOLUTION: The heat-shielding member is installed in the apparatus for pulling up the silicon single crystal rod 25 from a silicon melt 12 stored in a quartz crucible 13 by being heated by a heater 18 surrounding the outer circumferencial surface of the quartz crucible 13; and is provided with a cylindrical part 37 the lower end of which is positioned above the surface of the silicon melt 12 with a space from it and which surrounds the outer circumferencial surface of the silicon single crystal rod 25, and a bulged part 41 installed at the lower part of the cylindrical part 37 bulging toward the inside of the cylinder. A heat-insulating cover 51 is provided with a housing 52 constituted detachably at the lower part of the bulged part 41, and a heat insulating material 53 filled in the housing 52. COPYRIGHT: (C)2006,JPO&NCIPI
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