OPTICAL VISUAL EXAMINATION METHOD AND OPTICAL VISUAL EXAMINATION DEVICE

摘要

PROBLEM TO BE SOLVED: To accurately inspect a flexible thin substrate such as a film mask or the like using an inexpensive apparatus.

SOLUTION: The film mask 1 is placed on a placing table 2 and air is ejected to the vicinity of the scanning position of an imaging part 3 from an air blow block 6 attached so as to follow the imaging part 3 through a nozzle 7. The film mask 1 is scanned by the imaging part 3 while the periphery of the scanning position on the film mask 1 is closely brought into contact with the placing table 2 to photograph the inspection region of the film mask 1.

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