| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for cleaning resist piping in a resist coater, which can clean the resist piping in an easy, reliable and safe manner by reducing the internal volume of a resist filter part. <P>SOLUTION: In this method for cleaning the resist piping in the resist coater, a cap 41 having a recess 42 shallower than a housing 12 in a resist filter is mounted on an upper lid 13 having piping. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
