| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer transfer apparatus which can automatically output and input a semiconductor wafer, only when it is installed at a predetermined position. SOLUTION: In the wafer transfer apparatus 100, a stopper 105 is provided which prevents wafer in a closed state from protruding to the wafer-removing surface 119 of the front surface of a carrier 103, and which can remove the wafer in an open state. Further, the carrier 103 has a leg 104. Moreover, a protruding part 121, protruding from the carrier 103 in a non-contact state is provided at the lower end of the stopper 105. When the protruding part 121 is pushed upward from the bottom of the carrier 103, the stopper 105 is rotated so as to become an open state. COPYRIGHT: (C)2006,JPO&NCIPI |
