发明名称 PROBE POSITION ADJUSTING FILM
摘要 PROBLEM TO BE SOLVED: To provide a probe position adjusting film capable of adjusting efficiently the position of a probe disposed on electronic component inspection equipment or the like such as a probe card. SOLUTION: This probe position adjusting film is used for adjusting the probe position for electronic component inspection, and preferably formed of an elastomer composition. The elastomer composition includes a polymer selected from hydrogenated matters of diene-based block copolymers and polar group-denatured olefin-based polymers. The hydrogenated matter of the diene-based block copolymer is preferably a hydrogenated matter of a block copolymer of a conjugated diene, or a hydrogenated matter of a block copolymer comprising a conjugated diene and an aromatic vinyl compound, or the like. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005308549(A) 申请公布日期 2005.11.04
申请号 JP20040125990 申请日期 2004.04.21
申请人 JSR CORP 发明人 SUZUKI MASANORI;MIZOUCHI HIROYUKI;TOYODA NOBUYUKI;MORIKAWA AKIHIKO
分类号 G01R1/073;H01L21/66;(IPC1-7):G01R1/073 主分类号 G01R1/073
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