| 摘要 |
PROBLEM TO BE SOLVED: To provide a paste film-forming apparatus which can form a paste film with a predetermined thickness on a transfer stage even if viscosity of paste transferred to a bump etc. is low. SOLUTION: This paste film-forming apparatus, wherein a film forming squeegee 15 and a smoothing squeegee 14 are arranged on a top surface of the transfer stage 13 in parallel, forms the paste film on the transfer stage 13 by reciprocating the squeegee 14 and 15 in a direction orthogonal to a width direction. A width w<SB>1</SB>of the squeegee 15 is set larger than a width w<SB>2</SB>of the transfer stage 13; a paste reservoir groove 17 is formed on the periphery of the transfer stage 13; and paste scooping parts 19 for scooping up the paste, accumulated in the groove 17, into a space part formed between the squeegees 15 and 14 are provided at both the width-direction ends of the smoothing squeegee 14. COPYRIGHT: (C)2006,JPO&NCIPI
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