发明名称 |
FIN FIELD EFFECT TRANSISTOR ARRANGEMENT AND METHOD FOR PRODUCING A FIN FIELD EFFECT TRANSISTOR ARRANGEMENT |
摘要 |
The invention relates to a fin field effect transistor arrangement comprising a substrate, a first fin field effect transistor on and/or in said substrate that has a fin in which the channel region is formed between the first and second source/drain region, and above which the gate region is formed, and comprising a second fin field effect transistor on and/or in the substrate that has a fin in which the channel region is formed between the first and second source/drain region, and above which the gate region is formed. The height of the fin of the first fin field effect transistor arrangement is greater than the height of the fin of the second fin field effect transistor. |
申请公布号 |
WO2005104238(A1) |
申请公布日期 |
2005.11.03 |
申请号 |
WO2005DE00746 |
申请日期 |
2005.04.22 |
申请人 |
INFINEON TECHNOLOGIES AG;HOFMANN, FRANZ;LANDGRAF, ERHARD;LUYKEN, RICHARD, JOHANNES |
发明人 |
HOFMANN, FRANZ;LANDGRAF, ERHARD;LUYKEN, RICHARD, JOHANNES |
分类号 |
H01L21/84;H01L27/12;H01L29/786 |
主分类号 |
H01L21/84 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|