发明名称 FIN FIELD EFFECT TRANSISTOR ARRANGEMENT AND METHOD FOR PRODUCING A FIN FIELD EFFECT TRANSISTOR ARRANGEMENT
摘要 The invention relates to a fin field effect transistor arrangement comprising a substrate, a first fin field effect transistor on and/or in said substrate that has a fin in which the channel region is formed between the first and second source/drain region, and above which the gate region is formed, and comprising a second fin field effect transistor on and/or in the substrate that has a fin in which the channel region is formed between the first and second source/drain region, and above which the gate region is formed. The height of the fin of the first fin field effect transistor arrangement is greater than the height of the fin of the second fin field effect transistor.
申请公布号 WO2005104238(A1) 申请公布日期 2005.11.03
申请号 WO2005DE00746 申请日期 2005.04.22
申请人 INFINEON TECHNOLOGIES AG;HOFMANN, FRANZ;LANDGRAF, ERHARD;LUYKEN, RICHARD, JOHANNES 发明人 HOFMANN, FRANZ;LANDGRAF, ERHARD;LUYKEN, RICHARD, JOHANNES
分类号 H01L21/84;H01L27/12;H01L29/786 主分类号 H01L21/84
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