发明名称 |
Scanning probe microscope and specimen surface structure measuring method |
摘要 |
A digital probing type atomic force microscope (AFM) for measuring high aspect structures with high precision. A probe 21 is vibrated while moved to the vicinity of an atomic force region on a specimen surface. The position of the probe is measured when a specified atomic force is detected in the atomic force region. The probe is then moved away from the specimen surface. A servo system for maintaining a gap between the probe and specimen surface is stopped. The probe is moved to a measurement point along the specimen surface while kept away from the specimen. The vibration frequency is a frequency slightly offset from the cantilever resonance point. The atomic force is detected based on the vibration amplitude of the cantilever.
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申请公布号 |
US2005242283(A1) |
申请公布日期 |
2005.11.03 |
申请号 |
US20050503701 |
申请日期 |
2005.06.27 |
申请人 |
HASEGAWA TSUYOSHI;AONO MASAKAZU;NAKAYAMA TOMONOBU;HOSAKA SUMIO |
发明人 |
HASEGAWA TSUYOSHI;AONO MASAKAZU;NAKAYAMA TOMONOBU;HOSAKA SUMIO |
分类号 |
G01B21/30;G01Q10/04;G01Q10/06;G01Q20/02;G01Q60/24;G01Q60/32;G01Q60/38;G01Q70/12;(IPC1-7):G01N23/00 |
主分类号 |
G01B21/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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