发明名称 LOW REFLECTION MICROWAVE WINDOW
摘要 <p>A microwave window (10) for transmitting microwave radiation includes a solid body (12) and a flange (18). The solid body (12) includes a first surface (14) and a second surface (16) spaced apart from each other in a first direction thereby defining a thickness of the solid body in the first direction. The flange (18) is disposed at a periphery of the solid body (12) such that a peripheral portion of the solid body extends a length into the flange in a second direction perpendicular to the first direction. The thickness and the length are selected such that the power of reflections of microwave radiation by the microwave window (10) are no more than about ten times the power of reflections at the minimum value.</p>
申请公布号 WO2005104174(A1) 申请公布日期 2005.11.03
申请号 WO2005US04069 申请日期 2005.02.08
申请人 TOKYO ELECTRON LIMITED;MITROVIC, ANDREJ, S. 发明人 MITROVIC, ANDREJ, S.
分类号 H01J37/32;H01P1/08;(IPC1-7):H01J37/32 主分类号 H01J37/32
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