SHEET-LIKE PROBE, METHOD OF PRODUCING THE PROBE, AND APPLICATION OF THE PROBE

摘要

A sheet-like probe in which electrode structure bodies are each composed of a front surface electrode section exposed to the front surface of an insulation layer, projecting from the front surface of the insulation layer, and having a shape whose diameter is reduced from a base end of the front surface electrode section toward its head, a back surface electrode section exposed to the back surface of the insulation layer, and a short-circuit section continuously extending from the base end of the front surface electrode section, penetrating the insulation layer in its thickness direction, and connected to the back surface electrode section. The diameter of the base end of the surface electrode is greater than the diameter of that end of the short-circuit section which is in contact with the front surface electrode section.