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发明名称
Halbleiterbauelement-Testgerät und Verfahren zur Durchführung von Tests in einem solchen
摘要
申请公布号
DE19880680(B4)
申请公布日期
2005.11.03
申请号
DE19981080680
申请日期
1998.04.16
申请人
ADVANTEST CORP., TOKIO/TOKYO
发明人
ONISHI, TAKESHI;SUZUKI, KATUHIKO
分类号
G01R31/26;G01R31/01;G01R31/28;H01L21/66;(IPC1-7):G01R31/26
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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