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发明名称
FOCUS RING OF DRY ETCH DEVICE
摘要
申请公布号
KR20050104440(A)
申请公布日期
2005.11.03
申请号
KR20040029389
申请日期
2004.04.28
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
YI, JUNG HUI
分类号
H01L21/3065;(IPC1-7):H01L21/306
主分类号
H01L21/3065
代理机构
代理人
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