发明名称 Detection apparatus
摘要 A pixelated detector for obtaining images of an object has pixels whose outlines are different. These can be used to achieve improved resolution in use of the detector. To achieve improved resolution, the detector can be moved in relation to the object, so that pixels having smaller dimensions supplement the data obtained with larger pixels. To optimise selection and use of the detector, there may be a priori image information and improved resolution can be obtained without the relative movement.
申请公布号 US2005242268(A1) 申请公布日期 2005.11.03
申请号 US20050521750 申请日期 2005.01.19
申请人 OAKLEY PHILIP J 发明人 OAKLEY PHILIP J.
分类号 H01L27/146;H01L27/148;H04N5/225;H04N5/335;(IPC1-7):H01L27/00 主分类号 H01L27/146
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