发明名称 Method and apparatus for removing and/or preventing surface contamination of a probe
摘要 To remove and/or prevent contamination of a probe, at least a portion of the probe is positioned in a chamber having an inlet passage and an outlet passage, with a distal end of the probe extending through the outlet passage and terminating on a side thereof opposite the chamber. A gas is caused to flow through the inlet passage into the chamber and out the outlet passage, thereby modifying an environment surrounding the distal end of the probe. The gas may be heated prior to injection.
申请公布号 US2005241175(A1) 申请公布日期 2005.11.03
申请号 US20040834320 申请日期 2004.04.28
申请人 SOLID STATE MEASUREMENTS, INC. 发明人 HOWLAND WILLIAM H.JR.;HEALY JAMES E.JR.
分类号 G01R31/26;B08B5/00;F26B7/00;F26B25/00;G01Q10/00;G01Q60/10;G01Q60/14;G01Q70/02;G01Q70/06;G01R1/06;G01R3/00;G01R31/28;H01L21/66;(IPC1-7):F26B25/00 主分类号 G01R31/26
代理机构 代理人
主权项
地址