SHEET-SHAPED PROBE, MANUFACTURING METHOD THEREOF AND APPLICATION THEREOF

摘要

A sheet-shaped probe, a method for manufacturing the probe and application of the probe are provided, by which a small-diameter surface electrode part can be formed, a stable connecting status can be attained even for a circuit device having a small-pitch electrode, a high durability can be obtained by preventing an electrode structure from dropping from an insulating film, a positional shift of the electrode structure from an electrode to be inspected due to temperature change in a burn-in test can be surely prevented for large-area wafers and the circuit devices having the small-pitch electrode to be tested, and excellent connecting status can be stably maintained. The sheet-shaped probe is provided with a contact point film having an insulating film and a plurality of the electrode structures extending in a thickness direction of the insulating film, and a supporting film made of a metal for supporting the contact point film. The electrode structure is composed of the front surface electrode part protruding from a front surface of the insulating film, a rear surface electrode part exposing on a rear surface of the insulating film, a short-circuiting part which extends continuously from a base edge of the front surface electrode part in the thickness direction of the insulating film and is connected to the rear surface electrode part, and a supporting part which extends continuously outward from the base edge part of the front surface electrode part along the front surface of the insulating film.