METHOD OF MANUFACTURING A FIXED ABRASIVE MATERIAL

摘要

Provided is a method for manufacturing a fixed abrasive material (19) suitable for use in CMP planarization pads from an aqueous polymer dispersion that also includes abrasive particles (30) that involves frothing the polymer dispersion, applying the froth to a substrate, mold or carrier and curing the froth to form a fixed abrasive material (19) having an open cell structure containing between about 5 and 85 wt% abrasive particles and a dry density of about 350kg/m<3> to 1200 kg/m<3>.