| 发明名称 |
Device for measuring pressure for vacuum systems |
| 摘要 |
<p>A pressure-measuring device for vacuum units for coating or layer modification of objects or substrates in an inner receptacle (2) in a process chamber (4) comprises an elastic region (1) in the receptacle with a device (3) to measure the deformation of this region under pressure change.</p> |
| 申请公布号 |
EP1592043(A2) |
申请公布日期 |
2005.11.02 |
| 申请号 |
EP20050009344 |
申请日期 |
2005.04.28 |
| 申请人 |
CENTROTHERM PHOTOVOLTAICS AG |
发明人 |
VOELK, HANS-PETER, DIPL-ING.;WANKA, HARALD, DR.;REICHART, HANS |
| 分类号 |
C23C14/54;C23C14/56;C23C16/44;C23C16/52;C30B25/16;H01J37/32;H01L21/00;(IPC1-7):H01L21/00 |
主分类号 |
C23C14/54 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
