Apparatus for processing a substrate of flat panel display device using plasma,申请号KR20030041221-传众专利搜索

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发明名称	Apparatus for processing a substrate of flat panel display device using plasma
摘要
申请公布号	KR100525928(B1)	申请公布日期	2005.11.02
申请号	KR20030041221	申请日期	2003.06.24
申请人		发明人
分类号	G02F1/13;(IPC1-7):G02F1/13	主分类号	G02F1/13
代理机构		代理人
主权项
地址

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