| 摘要 |
Disclose is a substrate transferring apparatus, and more particularly, a substrate transferring apparatus which can easily transfer a substrate floated on a substrate support plate in a state of making the substrate more flat by controlling a gas spray unit and a gas suction unit. The substrate transferring apparatus includes a substrate transferring unit for transferring a substrate, a substrate support plate composed of a plurality of gas spray units for performing gas-floating of the substrate and a plurality of gas suction units for maintaining the substrate flat, and a gas ventilation unit that is respectively conduit-connected to the gas spray unit and the gas suction unit for gas injection and suction of the gas injection unit and the gas suction unit. |
