发明名称 |
METHODS FOR TRANSFERRING SUPERCRITICAL FLUIDS IN MICROELECTRONIC AND OTHER INDUSTRIAL PROCESSES |
摘要 |
<p>A method of displacing a supercritical fluid from a pressure vessel (e.g., in a microelectronic manufacturing process), with the steps of: providing an enclosed pressure vessel containing a first supercritical fluid (said supercritical fluid preferably comprising carbon dioxide); adding a second fluid (typically also a supercritical fluid) to said vessel, with said second fluid being added at a pressure greater than the pressure of the first supercritical fluid, and with said second fluid having a density less than that of the first supercritical fluid; forming an interface between the first supercritical fluid and the second fluid; and displacing at least a portion of the first supercritical fluid from the vessel with the pressure of the second, preferably fluid while maintaining the interface therebetween.</p> |
申请公布号 |
EP1590307(A2) |
申请公布日期 |
2005.11.02 |
申请号 |
EP20030799942 |
申请日期 |
2003.12.08 |
申请人 |
MICELL TECHNOLOGIES |
发明人 |
MCCLAIN, JAMES, B.;DEYOUNG, JAMES, P.;GROSS, STEPHEN, M.;WAGNER, MARK, I. |
分类号 |
C03C23/00;B05D1/18;B08B3/00;B08B5/00;B08B7/00;B81B3/00;B81C1/00;H01L21/00;H01L21/02;H01L21/306;(IPC1-7):C03C23/00 |
主分类号 |
C03C23/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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