发明名称 |
Mould for nanoimprinting, method of manufacture of such a mould and use of such a mold |
摘要 |
The mould, having a surface pattern (12) produced by a series of recesses (12.1) and projections (12.2), has one or more channels (13) linking the surface pattern to a reservoir zone (14) with one or more reservoirs. The channels connect with the bases of the recesses and have a cross-section that is smaller that the area of the pattern where it emerges; they can have a constant or variable, e.g. conical, crosssection. A duct connects the reservoir(s) to the mould's outer surface. The mould is made by covering a core produced by a lithographic process, using a light- or electron-sensitive resin.
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申请公布号 |
EP1591218(A1) |
申请公布日期 |
2005.11.02 |
申请号 |
EP20050103405 |
申请日期 |
2005.04.26 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE;CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS) |
发明人 |
LANDIS, STEFAN;MOLLARD, LAURENT;GOURGON, CECILE;TORTAI, JEAN-HERVE |
分类号 |
B29C33/00;B29C33/42;B29C33/38;B29C33/76;B29C43/36;B29C59/02;G03F7/00;(IPC1-7):B29C33/00 |
主分类号 |
B29C33/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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