发明名称 |
Method and apparatus to facilitate separation of a mask and a mask platform |
摘要 |
A method and apparatus to facilitate separation of a mask and mask platform is described. That method and apparatus comprises a temperature differential device that provides a temperature differential between a mask and a mask platform. The temperature differential facilitates separation of the mask and the mask platform.
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申请公布号 |
US6961119(B2) |
申请公布日期 |
2005.11.01 |
申请号 |
US20030695242 |
申请日期 |
2003.10.27 |
申请人 |
INTEL CORPORATION |
发明人 |
LEE SANG HUN |
分类号 |
G03F7/20;(IPC1-7):G03B27/52;G03B27/58;G03B27/62 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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